Linear Motion Systems


NEW Asymmetric, Monolithic XY stages

ALIO’s NEW Asymmetric, Monolithic XY stages

These Asymmetric XY’s represent another unique ALIO offering in the industry.  Over the years we’ve come across many applications that do not require identical travel lengths on both axes.  A standard Monolithic XY is always what we would recommend regardless of the different X and Y travel requirements as we know a stacked XY is going to compromise performance.  We would sometimes limit travel in the upper axis which would save on the overall moving footprint but the square body of the stage would still be larger than it would need to be based on the required travel for the application.  Competitors very often will offer an XY stack comprised of their single axis crossed roller stages and tuning was always a challenge due to the torsional stiffness of the lower axis and the bending moments of the upper axis (kind of like trying to find stable footing on a diving board that is sitting on a tightrope!)  For applications where the X and Y Travels do not need to be the same our Monolithic Asymmetric stages provide a solution with identical performance and smaller static and dynamic footprint compared with their square-body design counterparts. They also offer a lower profile than traditional XY stacks and without the tuning limitations of stacked assemblies.    Our Asymmetric XY stages can provide customers with the exact travel ranges needed for their applications without the cost of excess travel that is not required and will never be used.


XY Stage

Linear Motor Monolithic XY

ALIO’s XY Monolithic True Nano® motion systems' performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 30mm – 440mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Monolithic


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XY Stage

Linear Motor Monolithic XY – Open Center / Aperture

ALIO’s XY Monolithic True Nano® motion systems' performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 30mm – 440mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Monolithic


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Single Axis Linear Stages

Linear Motor Stage

ALIO’s True Nano® linear motion systems' performance is unequaled for 6-D Nano Precision®. With excellent performance in straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 25mm – 300mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Stages


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Linear Motor Driven, Air Bearing Guided


Single-Axis


6" x 6"

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Drawing
Specifications


XY Planar Air Bearing


Closed Center

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Drawing
Specifications

Open Center

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Drawing
Specifications


Linear Motor Driven, Long Stroke Stages


High Precision Micron-II Stages

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Endless configurations available. Contact ALIO regarding your specific application needs.
Delivered as Complete System – ready to run.



Specialty Stages


High-Frequency X or Z stage

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magnetic counterbalance

Drawing
Electrical
Specifications

18mm x 11mm Step Stage

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Drawing
Electrical
Specifications

Vacuum Stages

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 Contact ALIO for sizing


To download our datasheet please complete for form below.

CLOSED CENTER XY MONOLITHIC

Open Center XY Monolithic