Linear Motion Systems


XY Stage

Linear Motor Monolithic XY

ALIO’s XY Monolithic True Nano® motion systems' performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 30mm – 440mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Monolithic


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XY Stage

Linear Motor Monolithic XY – Open Center / Aperture

ALIO’s XY Monolithic True Nano® motion systems' performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 30mm – 440mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Monolithic


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Single Axis Linear Stages

Linear Motor Stage

ALIO’s True Nano® linear motion systems' performance is unequaled for 6-D Nano Precision®. With excellent performance in straightness and flatness you can be assured that your point precision is True Nano®. This stage family is available from 25mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

  • Travel: 25mm – 300mm
  • Velocity: up to 1m/sec
  • Resolution: < 5nm
  • Bi-Directional Repeatability: < ± 30nm
  • Displacement Accuracy: < 1 µm
  • Standard and Highly Dynamic Grades

Standard Monolithic


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High Dynamic Stages


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Linear Motor Driven, Air Bearing Guided


Single-Axis


6" x 6"

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Drawing
Specifications


XY Planar Air Bearing


Closed Center

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Drawing
Specifications

Open Center

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Drawing
Specifications


Linear Motor Driven, Long Stroke Stages


High Precision Micron-II Stages

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Endless configurations available. Contact ALIO regarding your specific application needs.
Delivered as Complete System – ready to run.



Specialty Stages


High-Frequency X or Z stage

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magnetic counterbalance

Drawing
Electrical
Specifications

18mm x 11mm Step Stage

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Drawing
Electrical
Specifications

Vacuum Stages

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 Contact ALIO for sizing


To download our datasheet please complete for form below.

CLOSED CENTER XY MONOLITHIC

Open Center XY Monolithic