Nanotechnology and Advanced Motion Controlled Positioning Systems



Nano-precision
Motion Control
Products &
Systems

Hexapods

Air Bearing Stages

Linear Stages

Rotary Stages

Vacuum Stages

Custom Stages

Motion Controllers

Project
Requirements
Form


Rotary Stages

rotary_stage
AI-80R-D

goniometer_stage
AI-gonio-40TT

custom_gimbal_stage
Custom Gimbal with 3 AI-80R-Q

 

rotary_air_bearing

Rotary Air Bearing with less than 0.025 microns runout

 

custom_rotary_stage

Custom OEM Rotary Stage

ALIO has developed ultra high precision rotary stages to meet and exceed today's demand for high precision motion.

Mechanical Rotary Stages

Mechanical bearings rotary stages have been design with crossed roller bearings for improved stiffness for off set loads and rotational precision. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra machined parallel surfaces. (Notice the precision lands on the top of the AI-80R-D picture.)

ALIO stages have a standard 0.2 arc second resolution with the ALIO supplier motion controllers. Typical standard mechanical crossed roller bearings are rated at 20 microns or radial and axial runout with optional 6 microns is also available.

Crossed Roller Bearing Goniometer

Goniometer stages are affective solution for 5 to 10 degrees of pitch and yaw applications. ALIO gonio product family has several size and mass capability all with precision crossed roller bearings for stiffness and precision.

Gimbal Rotational Stages

When ultra runout precision is needed customers can choose from our precision ground ceramic or air bearings.  ALIO can customize theta stages to meet your demanding environment and precision needs with either of these designs. 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Please contact ALIO to discuss your application needs.

Renishaw Signum Interface Interpolators

40R(arc sec)

80R (arc sec)

Analog 1V p-p

SI-0000

0.03

0.02

5 micron

SI-0004

27.50

20.63

1 micron

SI-0020

5.50

4.13

0.5 micron

SI-0040

2.75

2.06

0.2 micron

SI-0100

1.10

0.83

0.1 micron

SI-0200

0.55

0.41

50 nm

SI-0400

0.28

0.21

20 nm

SI-1000

0.11

0.08

 

updated: 04/16/2007



Data Sheets

AI-40R

AI-40R-D

AI-80R

AI-80R-D

AI-80R-Q

AI-80R-DME

AI-133R

AI-133R-D

AI-133R-Q

AI-HR1/ST-GONI-060

AI-HR1-GONI-060-D

AI-HR1-ST1-GONI-060-D

AI-HR1-GONI-077

AI-HR2-GONI-064

AI-HR2-GONI-064-D

AI-GONI-064-ME

AI-GONI-064-ME-D

AI-HR2-GONI-090

AI-GONI-090-ME

AI-HR2-GONI-116

AI-GONI-116-ME

Theta Stage Brochure