Linear Stages
TRUE NANO ™ Motion Systems with NIST traceable DATA
100mm travel X-Y laser tested at 300 nm flatness
150 mm XY Open Center System laser tested to 130 nm repeatability
25 mm travel Ceramic Servo Stage
X-Y Gantry with linear servo motors
150 mm travel UHV Vacuum Open Center XY Linear Stage System
200 mm travel Linear Motor XYZ Stage System for Nano Machining
50 mm travel Linear XY Open Center System |
ALIO Industries engineers and manufacturers nano resolution linear stages for stand alone motion systems or stackable axes in various serial kinematic structures. The standard stages can be modified or re engineered to meet customer needs plus these products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software. Stages are available for end-user and OEM applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.
ALIO's approach to the linear stage world was to build the best metal structure possible with design and manufacturing then find and integrate the high quality and precision component found in the world market.
The result of these laborious tasks is linear stages that far exceed flatness and straightness of current commercially available products.
The 400 mm stage comes standard with less than 10 microns of flatness with a precision crossed roller bearing. As you can see from the picture the kidney shaped lands have been precision tuned to the bearing rails to assure these specifications with non addition cost to the customer. These stages are price and performance unchallenged in the world market.
Ask ALIO how we customize our large stage selections to fit your applications and maintain our performance price advantage.
updated: 03/08/2010 |
