Nanotechnology and Advanced Motion Controlled Positioning Systems



Nano-precision
Motion Control
Products &
Systems

Hexapods

Air Bearing Stages

Linear Stages

Rotary Stages

Vacuum Stages

Custom Stages

Motion Controllers

Project
Requirements
Form


Linear Stages


100mm travel X-Y


X_y_open_center_linear_stage

X-Y Open Center Stage System

nano_precision_linear_stage

25 mm travel Ceramic Servo Stage

 

gantry_linear_stage_system

X-Y Gantry with linear servo motors

 

 

vacuum_ XY_stage_UHV_open_center

150 mm travel UHV Vacuum Open Center XY Linear Stage System

 

 

 

 

nano_precision_Linear_xy_stage_system

 

100 mm travel Linear Motor XY Stage System

 

 

 

linear stage

50 mm travel Linear XY Stage System

ALIO Industries engineers and manufacturers nano resolution linear stages for stand alone motion systems or stackable axes in various serial kinematic structures. The standard stages can be modified or re engineered to meet customer needs plus these products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software. Stages are available for end-user and OEM applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.

ALIO's approach to the linear stage world was to build the best metal structure possible with design and manufacturing then find and integrate the high quality and precision component found in the world market.

The result of these laborious tasks is linear stages that far exceed flatness and straightness of current commercially available products.

The 400 mm stage comes standard with less than 10 microns of flatness with a precision crossed roller bearing. As you can see from the picture the kidney shaped lands have been precision tuned to the bearing rails to assure these specifications with non addition cost to the customer. These stages are price and performance unchallenged in the world market.

Ask ALIO how we customize our large stage selections to fit your applications and maintain our performance price advantage.

 

 

 

 

 

 

 

 

 

 

updated: 06/21/2007



Data Sheets

ENCLOSED MOTOR
with Ceramic Servo Motors

AI-2500

AI-2500-ME

AI-2500Z ::

AI-5000

AI-10000

AI-15000

AI-20000

AI-30000

AI-40000

Linear AI-LM-5000

Linear AI-LM-10000

Linear AI-LM-20000 ::

Linear AI-LM-30000 ::

Linear AI-LM-40000 ::

AI-LMR-40000

AI-LMR-40000-XY

OPEN MOTOR
LINEAR STAGES

AI-HR1-1200E

AI-HR2-1200E

AI-D2-1200E

AI-HR2-2500E

AI-HR4-2500E

AI-D4-2500E

AI-HR8-2500E

AI-D8-2500E

AI-HR2-5000E

AI-D4-5000E

AI-HR4-5000E

AI-HR8-5000E

AI-D8-5000E

AI-D8-5000E-SFF

AI-H4-5000E-CB-25MM

AI-HR4-10000E

AI-HR4-10000E XY

AI-D4-10000E

AI-D4-10000E XY

AI-D8-10000E

AI-HR4-15000E

AI-D4-15000E

AI-D8-15000E

AI-HR4-20000E

AI-D4-20000E

AI-D8-20000E

AI-D8-30000E

AI-D8-40000E

COMPACT OPEN
X-Y STAGE

AI-HR4-5000E-XY

AI-HR4-8000E-XY

AI-HR4-10000E-XY

AI-HR4-13500-XY

AI-HR4-15000E-XY

AI-LM-10000E-XY

AI-LM-13500E-XY

AI-LM-15000E-XY

Linear Stage Brochure

LASER DATA