Nanotechnology and Advanced Motion Controlled Positioning System



Nano-precision
Motion Control
Products &
Systems

Hexapods

Air Bearing Stages

Linear Stages

Rotary Stages

Vacuum Stages

Custom Stages

Motion Controllers

Project
Requirements
Form

Hexapod Robotic Stages

Product Specifications

Tripod Hexapods

Model

AI-TRI-HR2-SS

AI-TRI-HR2

AI-TRI-HR4

AI-TRI-HR8

Z Force

24 N

48 N

96 N

192 N

Z Travel

27.5 mm

45 mm

45 mm

100 mm

Pitch & Roll

+/- 24 deg

+/- 24deg

+/- 24 deg

+/- 24 deg

Resolution

5 nm

5 nm

5 nm

5 nm

 

AI-TRI-HR4 Tripod

Tripod

AI-HR2-SS Tripod with XY and Theta base

   

 

updated: 10/10/2007



Product Specs

Single Motor Hexapods

Dual Motor Hexapods

Tripods

Industry Case Studies

Semiconductors

Related Articles

True Origin of Parallel Robots

Data Sheets

HEXAPODS

AI-HEX-HR2-SS

AI-HEX-HR2

AI-HEX-HR4-SS

AI-HEX-HR4

AI-HEX-HR8-SS

AI-HEX-HR8

TRIPODS

AI-TRI-HEX-HR2-SS

AI-TRI-HEX-HR4-SS

AI-TRI-HEX-HR8-SS

AI-TRI-HEX-HR2

AI-TRI-HEX-HR4