Air Bearing Stages

Nano-Precision Dovetail System

100 mm Travel X-Y Dovetail

Rotary Air Bearings Systems are available with ceramic servo motors or frameless rotary servo motors depending on your application needs.

• Many standard models using Professional Instruments and ALIO bearings.
• Custom systems
• Servo Motor or Ceramic Servo Motors
• Class 1 Clean Room compatible
• Standard radial and axial runout less than 1 micron

Rotary Air Bearing

Patent Pending X-Y Planar Motion System:

ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometer resolution over large volumes. The ALIO team took a new approach to the next generation of equipment needed for the FPD and metrology markets. Larger glass for Gen 7, 8 and beyond in FPB the issues of maintaining high volume and high yields during process and inspection the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors. The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design.

The X-Y Planar system has an application dependant platen for open center or vacuum wafer chuck mounting.

X-Y Planar Motion System

System Travel

300 mm x 300 mm

500 mm x 500 mm

1 meter x 1 meter

Drive System

Advanced Ceramic Servo Motor or Ironless Core Linear Motor

Feedback System

Non Contact Optical Encoder or Laser Interferometer Feedback

Resolution - Linear Encoder

5 nanometers with 4096x Interpolation

Resolution - Laser Interferometer

38 picometers with 4096x Interpolation

Load

Load Capacity is Sized for the Application (Please Consult the Factory)

Accuracy - Linear Encoder (XY)

Better Than +/- 0.5 um

Better Than +/- 0.75 um

Better Than +/- 1.0 um

Accuracy - Laser Interferometer (XY)

+/- 10 ppm Standard, +/- 1.5 ppm Compensated

Repeatability - Linear Encoder (XY)

+/- 50 nm

+/- 60 nm

+/- 80 nm

Repeatability - Laser Interferometer (XY)

+/- 10 nm

+/- 20 nm

+/- 30 nm

Straightness

+/- 0.5 um

+/- 1.0 um

+/- 1.5 um

Flatness (XY, Dependant on the Granite)

< +/- 0.5 um

< +/- 0.5 um

< +/- 1.0 um

Pitch/Roll

< 1 arc-second

Yaw

1 arc-second

Orthogonality

1 arc-second