MAXIMUM Z STROKE: 45mm
PITCH & ROLL RANGE: +/- 24 degrees
RANGE DEFINED AT MIDDLE OF Z STROKE
MOTORS: (6) HR-2 CERAMIC SERVO
FORCE, STANDARD: 48 N
TRIPOD SPEED: 200mm/sec
ENCODERS: (3) LINEAR OPTICAL
ENCODER OUTPUT: ANALOG 1 VOLT, PEAK TO PEAK
ENCODER RESOLUTION: 5nm
BEARINGS: PRECISION CROSSED ROLLER,
PRECISION SPHERICAL JOINT &
PRECISION BALL BEARINGS
STRUCTURE: ALUMINUM 6061-T6
ENVIRONMENT: STANDARD, CLEAN ROOM, VACUUM
10e-7 TORR, AND VACUUM 10e-10 TORR
TEMPERATURE: 0 to 50 DEG C
HUMIDITY: 10% to 80% NON-CONDENSING
INCLUDED EQUIPMENT
MOTION CONTROLLERS (DELTA TAU)
MOTOR AMPLIFIERS
SOFTWARE AND LICENSE
ALIO INDUSTRIES PROPRIETARY INFORMATION!
ALIO INDUSTRIES11919 W I-70 FRONTAGE ROAD NORTH, UNIT 119
WHEAT RIDGE, CO 80033 USA
(Tel) 303.339.7500 - www.alioindustries.com
