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Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries
Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries
Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries STANDARD FEATURES
MOTORS: IRONLESS CORE LINEAR MOTOR
               FORCE CONSTANT: 17.8 N/AMP
        PEAK FORCE: 169 N
TRAVEL: 150mm (X & Y)
SPEED: > 1 m/sec (X & Y)
ENCODER RESOLUTION: ANALOG 1 VOLT, PEAK TO PEAK
        OPTIONAL: 5um, 1um, 0.5um, 0.1um, 0.05um, 0.02um,
        0.01um or 5nm USING 4096 INTERPOLATION
        (CONTROLLER DEPENDENT)
SYSTEM REPEATABILITY: +/- 2 ENCODER COUNT
        (CONTROLLER DEPENDENT)
HOME SENSOR: STANDARD
BEARINGS: PRECISION CROSS ROLLER
        < 3.5um PARALLELISM
BEARING DYNAMIC LOAD RATING: 6kN
SYSTEM LOAD CAPACITY: APPLICATION DEPENDENT
        PLEASE CONSULT THE FACTORY
ENCLOSURES: ALUMINUM 6061-T6
        STAINLESS STEEL OPTIONAL
ENVIRONMENT: STANDARD, CLEAN ROOM, AND
        VACUUM 10e-6 TORR (CONSULT FACTORY)
TEMPERATURE: 0 to 100 DEG C
HUMIDITY: 10% to 80% NON-CONDENSING
ASSEMBLY MASS: 14.1 kg
MOVING MASS: X AXIS - 11.0 kg Y AXIS - 3.7

ACCESSORIES
MOTOR AMPLIFIER

OPTIONAL EQUIPMENT
MOTION CONTROLLERS

CUSTOM DESIGNS FOR OEM INTEGRATION
Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries

ALIO INDUSTRIES PROPRIETARY INFORMATION!

ALIO INDUSTRIES
11919 W I-70 FRONTAGE ROAD NORTH, UNIT 119
WHEAT RIDGE, CO 80033 USA
(Tel) 303.339.7500 - www.alioindustries.com
Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries