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 Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries  Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries  Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries  Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries
 Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries  Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries
 Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries STANDARD FEATURES
MOTORS: HR-4
        STD FORCE 16 N (X & Y)
        (CONSULT FACTORY FOR HIGHER FORCE)
TRAVEL: 80mm (X & Y)
SPEED: 250mm/sec (X & Y)
ENCODER RESOLUTION: ANALOG 1 VOLT, PEAK TO PEAK
        OPTIONAL: 5um, 1um, 0.5um, 0.1um, 0.05um, 0.02um,
        0.01um or 5nm USING 4096 INTERPOLATION
        (CONTROLLER DEPENDENT)
SYSTEM REPEATABILITY: +/- 1 ENCODER COUNT
        (CONTROLLER DEPENDENT)
HOME SENSOR: STANDARD
BEARINGS: PRECISION CROSS ROLLER
        < 2.0um PARALLELISM
BEARING DYNAMIC LOAD RATING: 4kN
SYSTEM LOAD CAPACITY: APPLICATION DEPENDENT
        PLEASE CONSULT THE FACTORY
ENCLOSURES: ALUMINUM 6061-T6
STAINLESS STEEL OPTIONAL
ENVIRONMENT: STANDARD, CLEAN ROOM, VACUUM
        10e-7 TORR, AND VACUUM 10e-10 TORR
        (CONSULT FACTORY)
TEMPERATURE: 0 to 100 DEG C
HUMIDITY: 10% to 80% NON-CONDENSING
ASSEMBLY MASS: 3.3 kg
MOVING MASS: X AXIS - 2.4 kg Y AXIS - 0.9 kg

ACCESSORIES
MOTOR AMPLIFIER

OPTIONAL EQUIPMENT
MOTION CONTROLLERS

CUSTOM DESIGNS FOR OEM INTEGRATION
 Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries

ALIO INDUSTRIES PROPRIETARY INFORMATION!

ALIO INDUSTRIES
11919 W I-70 FRONTAGE ROAD NORTH, UNIT 119
WHEAT RIDGE, CO 80033 USA
(Tel) 303.339.7500 - www.alioindustries.com
 Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries  Linear Stages with Nanometer Resolution and Repeatability by ALIO Industries