Nanotechnology and Motion Control Positioning Systems

 

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Nano-precision
Motion Control
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Hexapods

Air Bearing Stages

Linear Stages

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ALIO Solutions for Synchrotrons and Research Labs

ALIO Industries is the industry leading supplier of standard atmosphere, HV and UHV integrated nano-precision motion solutions to synchrotrons around the world. Our standard and custom engineered nano precision systems deliver the highest performance motion profiles in the most demanding applications available in the world market.

We have a successful track record delivering many systems to synchrotrons around the world:

ALIO’s full line of standard vacuum products are ideally suited for:

  • Soft X-ray
  • Monochronometers
  • Mass Spectrometry
  • Scanning Electron Beam Microscopes
  • EUV Lithography
  • Lithography
  • Biosciences
  • Microscopy
  • Nano Scale Material Science
  • Drug Discovery

Environments:

  • Standard Atmosphere
  • High (10E-3 TORR)
  • High Vacuum (10E-7 TORR)
  • Ultra High Vacuum (10E-10 TORR)
  • Low Magnetic
  • Non Magnetic


Robotics for Optics, Nano Particle Manipulation and Sample Positioning

The ALIO line of patented hexapods represents the leading edge of robotics for nano manipulation applications. These six axis parallel kinematic robots are very rigid yet provide smooth motion around a single point in space. They provide increased repeatability over stacked stages by reducing the introduction of sine and cosine errors. They are available in a variety of sizes and force capabilities for standard atmosphere, HV and UHV applications.

        

         Vacuum Hexapod                           High Vacuum Hexapod      Hexapod with Rotary

Open Center Motion Systems for Microscopy

ALIO Open Center XY and Rotary stages are engineered to provide high precision automated motion around an open center. The open center enables the user to illuminate and view samples from either the top or bottom while controlling motion with nanometer precision. The XY and Rotary stages are engineered for standard atmosphere, vacuum and ultra high vacuum (UHV) environments. The vacuum and UHV stages shown are made from stainless steel. These stages have been engineered to operate in both high vacuum and ultra high vacuum environments.

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   Vacuum Open XY           High Vacuum Open XY                       Vacuum Rotary


Miniature Linear, Rotary and Goniometric Stages

ALIO has also developed a line of smaller stages and goniometers that are ideal for extremely precise positioning of samples relative to a microscope, mass spectrometer or other devices. Like nearly all ALIO products these stages can be configured for a variety of environments including standard atmosphere, vacuum and ultrahigh vacuum.

        

Miniature HV Goniometer Stack Miniature HV Rotary Axis Miniature HV Rotary and HV Linear Stack

         

Long Travel Stages

ALIO has an extensive line of long travel stages that are ideal for applications requiring high precision and long travel at the same time.

   

Custom Stages

ALIO has delivered a large number of custom applications for synchrotrons

   

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